FEI Company has released an analytical DualBeam for advanced 3D research and development, the Quanta 3D FEG. Eliminating boundaries imposed by existing high vacuum systems, the DualBeam Quanta 3D FEG features high-current ion column for rapid, site-specific cross-sections of samples to reveal sub-surface structures and features. System's electron source optimizes SEM imaging, while electron beam current enables high throughput spectroscopy.
