Owens Design intros standard automation platform for semiconductor metrology OEMs

Owens Design Inc., a leading design and manufacturing service provider to the semiconductor, data storage and solar capital equipment markets, has introduced “Atlas”, a standard automation platform for semiconductor metrology OEMs. This new platform is said to drastically reduce the overall development cost and time to market for new metrology and inspection tools.

The Atlas platform uses a well-established industry standard 300mm/200mm capable EFEM to reliably align and transfer wafers from the loadports to the inspection station. Overall airflow and pressure balance between the process stage and the EFEM has been optimized through CFD modeling to ensure clean wafer transfer. The standard metrology automation platform has been designed to allow for wafer level thermal and vibration isolation to ensure a controlled environment for tool to tool matching. A standard power distribution and control system with a GUI interface has been integrated into the system and, when combined with the required connectivity software, the platform will meet all the 300mm factory software interface requirements. The Atlas tool platform has been designed to meet Semi S2 (operator safety) and Semi S8 (operator ergonomics) requirements.

The Atlas standard metrology automation platform is customized to allow for the integration of customer specific wafer staging, metrology modules, optics, wafer alignment mechanisms, and other components. Owens Design will customize the automation platform frame, skins, airflow, handling, and service access to meet specific customer needs.

Owens Design