Collaboration on advanced TCAD process simulation of CMOS technology
(Product News, 08 Aug 2008 )
Mattson Technology and Synopsys have announced a collaboration to offer calibrated process models for flash annealing equipment used on the 45nm node and beyond. Through this collaboration, Synopsys' Sentaurus Process models will be calibrated to the Mattson Millios flash-assist Rapid Thermal Process (fRTP) system. As a result, engineers will be able to simulate and optimize process conditions before costly silicon processing, thus lowering development time and cost.
