Cascade Microtech expands Infinity Probe series to 110GHz

Cascade Microtech has announced the expansion of the Infinity Probe series to 110GHz. The Infinity Probe is claimed to be the first characterization probe that offers both high-frequency performance and low, stable contact resistance on aluminum pads (typically <0.05½). The contact area of the probe tips is approximately 12312 microns, allowing probing of pads that are less than 50350µm in size.

The Infinity Probe series has been demonstrated to enable the extraction of the equivalent circuit parameters of devices and structures that are the most sensitive to contact resistance variation: inductors, capacitors, and inter-connects. This will enable test plans for wafers with aluminum pads to be fully automated with absolute confid-ence in the measurement results.

Due to the inconsistency in measured data using conventional probes, re-probing is often required and the probes often require cleaning after only three to five touchdowns.

"The lack of trust in the ability to achieve good contact means that tests are often performed manually. This resulted in a reduction in engineering product-ivity, increased costs and time to test," says Tariq Alam, RF/micro-wave marketing manager, "Recent case studies have shown that the same test plans that took eight hours due to current limitations can now be completed in less than one hour using the Infinity Probe. This demonstrates that significant increases in engineering product-ivity can be achieved."

The requirement for accurate high frequency testing to 110GHz is primarily driven by the evolution of silicon CMOS and SiGe technologies. This, combined with the need to probe aluminum pads with low contact resistance, have created an under-satisfied need and a performance gap in the marketplace.

Cascade Microtech
Fax 503-601-1002
www.cascademicrotech.com

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