SEZ Group has unveiled what it claims as a "breakthrough in wet surface-preparation spin processing." The new Da Vinci series unites high throughput and small footprint to provide a good level of serviceability and reliability in single-wafer approach. Its modular, multi-chamber design delivers SEZ's process capabilities to reduce cost of ownership (CoO) and meet high-volume manufacturing needs of customers worldwide. The Da Vinci series is designed to help speed the industry's transition from batch processing to single-wafer cleaning technology. Manufacturers increasingly demand sophisticated back-end-of-line (BEOL) polymer cleaning capabilities that will not complicate or slow down production lines. This is an issue that will become an even higher priority as the imminent upturn progresses. The first product in the Da Vinci series, the 8-chamber DV-38F, specifically targets BEOL processing of 300mm wafers with 90nm and below geometries. SEZ Group Fax 41-1-308-3500 www.sez.com Enter No. 350
SEZ Group has unveiled what it claims as a "breakthrough in wet surface-preparation spin processing." The new Da Vinci series unites high throughput and small footprint to provide a good level of serviceability and reliability in single-wafer approach. Its modular, multi-chamber design delivers SEZ's process capabilities to reduce cost of ownership (CoO) and meet high-volume manufacturing needs of customers worldwide. The Da Vinci series is designed to help speed the industry's transition from batch processing to single-wafer cleaning technology.
